JPS6154212U - - Google Patents

Info

Publication number
JPS6154212U
JPS6154212U JP13911884U JP13911884U JPS6154212U JP S6154212 U JPS6154212 U JP S6154212U JP 13911884 U JP13911884 U JP 13911884U JP 13911884 U JP13911884 U JP 13911884U JP S6154212 U JPS6154212 U JP S6154212U
Authority
JP
Japan
Prior art keywords
mirror
light
measurement data
scanning
timing signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13911884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338647Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984139118U priority Critical patent/JPH0338647Y2/ja
Publication of JPS6154212U publication Critical patent/JPS6154212U/ja
Application granted granted Critical
Publication of JPH0338647Y2 publication Critical patent/JPH0338647Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1984139118U 1984-09-13 1984-09-13 Expired JPH0338647Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984139118U JPH0338647Y2 (en]) 1984-09-13 1984-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984139118U JPH0338647Y2 (en]) 1984-09-13 1984-09-13

Publications (2)

Publication Number Publication Date
JPS6154212U true JPS6154212U (en]) 1986-04-11
JPH0338647Y2 JPH0338647Y2 (en]) 1991-08-15

Family

ID=30697498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984139118U Expired JPH0338647Y2 (en]) 1984-09-13 1984-09-13

Country Status (1)

Country Link
JP (1) JPH0338647Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63238508A (ja) * 1987-03-27 1988-10-04 Toshiba Corp 位置測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5669505A (en) * 1979-11-05 1981-06-10 Hitachi Ltd Laser position detecting device
JPS56125605A (en) * 1980-03-07 1981-10-02 Nippon Steel Corp Method and apparatus for detection of shape of striplike body

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5669505A (en) * 1979-11-05 1981-06-10 Hitachi Ltd Laser position detecting device
JPS56125605A (en) * 1980-03-07 1981-10-02 Nippon Steel Corp Method and apparatus for detection of shape of striplike body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63238508A (ja) * 1987-03-27 1988-10-04 Toshiba Corp 位置測定装置

Also Published As

Publication number Publication date
JPH0338647Y2 (en]) 1991-08-15

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